SEMICONDUCTOR DEVICE, AND MANUFACTURING METHOD THEREOF

PROBLEM TO BE SOLVED: To provide a semiconductor device and a manufacturing method thereof which form a wide gap semiconductor layer generating a two-dimensional electron gas using a compound semiconductor as constitutional elements of a semiconductor layer under the wide gap semiconductor layer to...

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Bibliographische Detailangaben
1. Verfasser: KIMURA CHIKAO
Format: Patent
Sprache:eng
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