METHOD OF MANUFACTURING PHOTOELECTRIC CONVERSION DEVICE

PROBLEM TO BE SOLVED: To provide a method of manufacturing a photoelectric conversion device which improves productivity, and at the same time, improves the positioning accuracy of a groove formed on a substrate, and improves manufacturing quality. SOLUTION: In the method of manufacturing the photoe...

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Bibliographische Detailangaben
Hauptverfasser: KOKAJI SOJI, YAMANE TSUKASA, SASAGAWA EISHIRO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method of manufacturing a photoelectric conversion device which improves productivity, and at the same time, improves the positioning accuracy of a groove formed on a substrate, and improves manufacturing quality. SOLUTION: In the method of manufacturing the photoelectric conversion device 90, when the photoelectric conversion device 90 is manufactured repeating the processing of grooves 10, 11, 12 into a film which is film formed after deposition is performed on a substrate 1, at least the grooves 11, 12 processed at second times or later are processed in a determined position based on an alignment mark M placed to the side 40 of the substrate 1, the method is characterized in that when the alignment mark M can not be detected in the time of processing the groove 11, 12, deposits adhered near the position where the alignment mark M is present are removed by wiping-off equipment 21. COPYRIGHT: (C)2010,JPO&INPIT