CHANGING METHOD FOR EXISTING CEILING INSTALLED APPARATUS
PROBLEM TO BE SOLVED: To provide a changing method for an existing ceiling installed apparatus that allows carrying of a ceiling installed apparatus into a space above the ceiling, moreover, even during operation of a clean room, and preventing dust in the operating clean room during carrying in of...
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Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a changing method for an existing ceiling installed apparatus that allows carrying of a ceiling installed apparatus into a space above the ceiling, moreover, even during operation of a clean room, and preventing dust in the operating clean room during carrying in of the apparatus with the ceiling installed. SOLUTION: A carriage 40, having a traveling tire 50 easily elastically deformed by an FFU (fan filter unit) 30b and external force, is carried into the space above the ceiling of the clean room 11 from a non-production area 11 of the clean room 11, the carriage 40 mounted with the FFU30b is moved on a blank panel 25, supported by a ceiling frame 20 of the space above the ceiling, and FFU30b is carried to a change position of the space above the ceiling which is to be installed with an existing. COPYRIGHT: (C)2010,JPO&INPIT |
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