EXHAUST SYSTEM OF CLEAN ROOM AND CONSTRUCTION METHOD USED FOR THE SAME

PROBLEM TO BE SOLVED: To provide a low-cost exhaust system of a clean room improving ability for bearing vibration and earthquake load through a vertical laminar flow type clean room structure by forming a suction hole in a concrete floor through concrete placing without a separate treatment while the suction hole has a cylindrical casing and an opening with a size required for suction, and a disk-shaped lid formed of aluminum is disposed, and also to provide a construction method used for the same. SOLUTION: The exhaust system of the clean room includes a cylindrical casing 4 having a lower stage connected with exhaust pipes arranged on the ground at regular intervals and having an upper stage on which the suction hole is formed, a ring shaped support frame 3 arranged at the inner circumferential edge of the upper stage of the casing 4, a circular arc-shaped retainer 2 arranged on the bottom of the support frame 3, and a disk-shaped lid 1 arranged on the support frame 3 through the retainer 2, having a plurality of the suction holes, and having a plurality of ribs around the suction holes for enhancing support force. COPYRIGHT: (C)2010,JPO&INPIT