RADIATION DETECTOR
PROBLEM TO BE SOLVED: To provide an X-ray detector capable of suppressing the increase of a dark current, suppressing the crystallization of an amorphous selenium layer, and enhancing heat resistance. SOLUTION: The X-ray detector 1 is formed of amorphous selenium and has an X-ray conversion layer 17...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an X-ray detector capable of suppressing the increase of a dark current, suppressing the crystallization of an amorphous selenium layer, and enhancing heat resistance. SOLUTION: The X-ray detector 1 is formed of amorphous selenium and has an X-ray conversion layer 17 that absorbs incident radiation and generates an electrical charge, a common electrode 23 provided on the surface of X-ray conversion layer 17 on the side exposed to radiation, and a signal readout circuit board 2 on which multiple pixel electrodes 7 collecting the charge generated by the X-ray conversion layer 17 are arranged. The radiation detector further has an electrical field moderating layer 13 that is formed between the X-ray conversion layer 17 and a signal readout circuit board 2 and contains arsenic and lithium fluoride, a crystallization suppression layer 11 that is formed between the electrical field moderating layer 13 and the signal readout circuit board 2 and that contains arsenic, and a first thermal characteristic strengthening layer 15 that is formed between the electrical field moderating layer 13 and the X-ray conversion layer 17, and contains arsenic. COPYRIGHT: (C)2010,JPO&INPIT |
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