X-RAY ANALYZER AND X-RAY ANALYSIS METHOD

PROBLEM TO BE SOLVED: To provide an X-ray analyzer capable of easily and directly recognizing a site with a predetermined concentration or higher for a specific element from an X-ray mapped image, and of specifying the site. SOLUTION: The X-ray analyzer includes an X-ray tube 2 for irradiating a sample S with radiant rays, an X-ray detector 3 for detecting characteristic X rays and scattered X-rays and outputting a signal including energy information thereof, an analyzer 5 for analyzing the signal, a sample stage 1 for enabling relative movement of a radiation point to the sample S in a mapping region M previously set, and an X-ray mapping processing section 6 for discriminating X-ray intensity corresponding to a specific element and deciding intensity contrast with a color or brightness changed in response to the X-ray intensity to display an image at a position corresponding to the radiation point, in which the X-ray mapping processing section 6 decides the intensity contrast of the X-ray intensity at the radiation point based on X-ray intensity that composition elements and concentrations thereof are previously discriminated for a known reference material 7. COPYRIGHT: (C)2010,JPO&INPIT