PRECURSOR SOLUTION FOR FILM FORMATION

PROBLEM TO BE SOLVED: To provide a precursor solution for film formation that enables the formation of a film containing niobium or tantalum by a coating method and has excellent storage stability. SOLUTION: The precursor solution for film formation comprises a reaction product produced by reacting...

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Hauptverfasser: NAKADA KUNIHIKO, SUGAWARA KENICHIRO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a precursor solution for film formation that enables the formation of a film containing niobium or tantalum by a coating method and has excellent storage stability. SOLUTION: The precursor solution for film formation comprises a reaction product produced by reacting a niobium compound or a tantalum compound with 2.5-3.5 moles of hydrogen oxide per one mole of niobium compound or tantalum compound and has a solid concentration of not more than 8.5 wt.%. COPYRIGHT: (C)2010,JPO&INPIT