STRUCTURE OF MOUNTING ELECTROSTATIC CAPACITANCE TYPE SENSOR

PROBLEM TO BE SOLVED: To obtain always stable sensor outputted by a simple structure using only one set of capacitance structures without modifying the structure of an electrostatic capacitance type sensor. SOLUTION: The structure of mounting the electrostatic capacitance type sensor includes: a substrate 12 forming a ground electrode 11 on the surface; the electrostatic capacitance type sensor (sensor chip) 13 having a movable electrode and a fixed electrode oppositely arranged by spacing a prescribed interval and detecting change of electrostatic capacitance accompanying change of the interval of the movable electrode and the fixed electrode; a mold resin 14 oppositely arranged by spacing the prescribed interval upward of the ground electrode and storing the electrostatic capacitance type sensor 13; and a metal film 16 provided on an opposite face side of the ground electrode of the electrostatic capacitance type sensor 13, electrically insulated from the movable electrode and the fixed electrode, and electrically connected to the ground electrode 11. COPYRIGHT: (C)2010,JPO&INPIT