DIAMOND-LIKE CARBON AND MANUFACTURING METHOD THEREOF

PROBLEM TO BE SOLVED: To provide a DLC thin film material which is p-type conduction in electric conduction, and has low resistivity and high hardness, to provide a manufacturing method of the DLC film, and to provide an industrial product using the DLC film. SOLUTION: In the diamond-like carbon in...

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Hauptverfasser:	SUZUKI YASUO, TODA TADAO, WATANABE MASANORI, NAKAJIMA KENJIRO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS THEREOF DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a DLC thin film material which is p-type conduction in electric conduction, and has low resistivity and high hardness, to provide a manufacturing method of the DLC film, and to provide an industrial product using the DLC film. SOLUTION: In the diamond-like carbon in which p-type dopant such as boron and magnesium of III group elements or II group elements of the Periodic Table, its electric conduction of p-type conduction. High concentration plasma of hydrocarbon gas of low molecular quantity is generated, and a base material to be worked is installed so as to be brought into contact with discharge plasma. The temperature of the base material is kept at ≥200°C, the positive and negative or negative pulse voltage of ≥1 kV is applied to the base material to manufacture a p-type conduction DLC film on the surface of the base material. COPYRIGHT: (C)2010,JPO&INPIT