METHOD OF FORMING FLUID-JETTING MICRO DEVICE AND METHOD OF FORMING INKJET PRINT HEAD

PROBLEM TO BE SOLVED: To form a fluid-jetting slot on a substrate with higher design flexibility by a laser beam. SOLUTION: In a feature 905 to be the fluid-jetting slot in the substrate 300 and its forming method, an exemplary embodiment is a micro device containing the substrate 300 extending betw...

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Bibliographische Detailangaben
Hauptverfasser: ADDINGTON CARY G, CLARKE LEO JR, ASCHOFF CHRIS
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To form a fluid-jetting slot on a substrate with higher design flexibility by a laser beam. SOLUTION: In a feature 905 to be the fluid-jetting slot in the substrate 300 and its forming method, an exemplary embodiment is a micro device containing the substrate 300 extending between a first substrate surface 302 and a second substrate surface 303 located approximately facing the first substrate surface 302, and at least one feature 905 formed on the first surface 302 along a bored axis non-perpendicular to the first surface 302. COPYRIGHT: (C)2010,JPO&INPIT