CONTROL DEVICE OF PLASMA TREATMENT DEVICE SYSTEM, CONTROL METHOD OF PLASMA TREATMENT SYSTEM, AND STORAGE MEDIUM STORING CONTROL PROGRAM

PROBLEM TO BE SOLVED: To provide a control device of a plasma treatment system effectively executing a pre-treatment; a control method of a plasma treatment system; and a storage medium storing a control program. SOLUTION: A device controller EC includes: a communication part 250 configured to receive treatment information related to a hoop of a next treatment lot; a determination part 255 configured to determine whether the received treatment information related to the hoop includes pre-treatment information for any of a plurality of plasma treatment devices; a generation unit 260 configured to generate a carrier object for declaring execution of the pre-treatment for the hoop of the next treatment lot when a desired condition related to transport of the hoop of the next treatment lot is satisfied when it is determined that the pre-treatment information is included; and a process execution control part 270 configured to start the pre-treatment for a wafer in the hoop of the next treatment lot without waiting for any notification that the hoop of the next treatment lot reaches a destination plasma treatment device if the object is generated. Thereby, the device controller EC controls a plasma treatment system 20 including the plurality of plasma treatment devices. COPYRIGHT: (C)2010,JPO&INPIT