SCANNING ELECTRON MICROSCOPE, AND METHOD OF IMPROVING IMAGE THEREFORE

PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of preventing the degradation of image quality and resolution of an acquired image, and to provide a method of improving a scanning electron microscope image. SOLUTION: A scanning electron microscope, in which a specimen is irra...

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Bibliographische Detailangaben
Hauptverfasser:	TOGAWA KENICHI, YOSHIIE MITSUYOSHI, SHIMADA HAJIME
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of preventing the degradation of image quality and resolution of an acquired image, and to provide a method of improving a scanning electron microscope image. SOLUTION: A scanning electron microscope, in which a specimen is irradiated with an electronic beam and information of a secondary signal generated from the specimen is imaged, includes: a storage part for storing correction data to correct a scanning signal for scanning the electronic beam on the specimen; a correction circuit to correct the scanning signal by using the correction data stored in the storage part; and a display to display an image acquired by using the scanning signal corrected by the correction circuit, wherein a correction data waveform generated based on the correction data is also displayed on the display. COPYRIGHT: (C)2010,JPO&INPIT