AQUEOUS DISPERSION FOR POLISHING AND POLISHING METHOD

PROBLEM TO BE SOLVED: To provide an aqueous dispersion for polishing a color filter, polishing uneven part generated on a color filter in a color filter manufacturing process while attaining high polishing speed and high flattening characteristic, and to provide a color filter polishing method using...

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1. Verfasser: UENO TOMIKAZU
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide an aqueous dispersion for polishing a color filter, polishing uneven part generated on a color filter in a color filter manufacturing process while attaining high polishing speed and high flattening characteristic, and to provide a color filter polishing method using the aqueous dispersion for polishing a color filter. SOLUTION: This aqueous dispersion for polishing a color filter includes: (A) inorganic particles having a mean primary particle diameter of 10-100 nm and a means secondary particle diameter of 30-300 nm, and (B) water soluble polymer having a molecular weight of 5,000-5,000,000. Further it may include (C) organic particles. COPYRIGHT: (C)2010,JPO&INPIT