METHOD OF MANUFACTURING CERAMIC MULTI-LAYERED SUBSTRATES

PROBLEM TO BE SOLVED: To provide a method of manufacturing ceramic substrates in which baking is performed after a conductor layer is formed on a baked ceramic green sheet laminate, wherein a ceramic substrate is prevented from warping, and the surface of the conductor layer is prevented from roughe...

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Bibliographische Detailangaben
1. Verfasser: SHIGEMI ATSUSHI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method of manufacturing ceramic substrates in which baking is performed after a conductor layer is formed on a baked ceramic green sheet laminate, wherein a ceramic substrate is prevented from warping, and the surface of the conductor layer is prevented from roughening by a baking jig. SOLUTION: In a method of manufacturing a ceramic substrate in which baking is performed after a conductor layer is formed on a baked ceramic green sheet laminate, the baking is performed by using a baking jig having a periphery support region for supporting all the edges of the ceramic green sheet laminate. COPYRIGHT: (C)2010,JPO&INPIT