VACUUM PROCESSING APPARATUS

PROBLEM TO BE SOLVED: To reduce the amount of mixture of moisture and particles in a processing container when a lid body for clogging the upper opening of a container body is opened and an object to be processed is brought into or taken out of the processing container. SOLUTION: The processing container 20 includes: the container body 21 internally having a placement base 3 for a substrate S being the object to be processed; and the lid body 22 for clogging the upper opening of the container body 21. A cover member 5 is arranged on the outer peripheral surface of the processing container 20 along the peripheral direction, so as to cover a gap in a region excluding at least the bringing-in/taking-out region of the substrate S when the gap is formed between the lid body 22 and the container body 21 in order to allow the substrate S to be brought into or taken out of the processing container 20. COPYRIGHT: (C)2010,JPO&INPIT