ELECTROSTATIC CAPACITY TYPE ACCELERATION SENSOR

PROBLEM TO BE SOLVED: To provide an electrostatic capacity type acceleration sensor capable of preventing detection failure without reducing detection sensitivity. SOLUTION: The electrostatic type acceleration sensor includes: a movable electrode 12c functioning as a weight; a substrate 11 made of silicon where space for storing the movable electrode 12c is formed; a deflection beam 11c for supporting the movable electrode 12c so that it can be elevated to the substrate 11 made of silicon; and a glass substrate 13 that has a fixed electrode 14e that opposes the movable electrode 12c with a prescribed interval and is joined to the main surface of the substrate 11 made of silicon. The deflection beam 11c has: a long section 21a along the periphery of the movable electrode 12c at a prescribed interval from the movable electrode 12c in a plan view; and a connection section 21b for connecting the long section 21a to the movable electrode 12c. On the glass substrate 13, a clearance groove 13a for preventing the deflection groove 11c to come into contact with the glass substrate 13 is formed at a position opposite to the deflection beam 11c. COPYRIGHT: (C)2010,JPO&INPIT