PROBE AND PROBE CARD

PROBLEM TO BE SOLVED: To provide a probe and a probe card capable of performing stable inspection repeatedly, and a manufacturing method of the probe. SOLUTION: The probe to be provided on the probe card for performing electric inspection to an object is equipped with a connection part 34 to be conn...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: NAGATA KAZUSHI
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator NAGATA KAZUSHI
description PROBLEM TO BE SOLVED: To provide a probe and a probe card capable of performing stable inspection repeatedly, and a manufacturing method of the probe. SOLUTION: The probe to be provided on the probe card for performing electric inspection to an object is equipped with a connection part 34 to be connected to a wiring board of the probe card, a contact part 31 to be brought into contact with an electrode pad of the object, a support part 36 for supporting the contact part 31, a plurality of beam parts 32 extending from the connection part 34 toward the support part 36, and a hinge part 33 for supporting rotatably the plurality of beam parts 32 to the support part and the connection part. COPYRIGHT: (C)2010,JPO&INPIT
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2009300218A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2009300218A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2009300218A3</originalsourceid><addsrcrecordid>eNrjZBAJCPJ3clVw9HNRgLCcHYNceBhY0xJzilN5oTQ3g5Kba4izh25qQX58anFBYnJqXmpJvFeAkYGBpbGBgZGhhaMxUYoAjyoeng</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>PROBE AND PROBE CARD</title><source>esp@cenet</source><creator>NAGATA KAZUSHI</creator><creatorcontrib>NAGATA KAZUSHI</creatorcontrib><description>PROBLEM TO BE SOLVED: To provide a probe and a probe card capable of performing stable inspection repeatedly, and a manufacturing method of the probe. SOLUTION: The probe to be provided on the probe card for performing electric inspection to an object is equipped with a connection part 34 to be connected to a wiring board of the probe card, a contact part 31 to be brought into contact with an electrode pad of the object, a support part 36 for supporting the contact part 31, a plurality of beam parts 32 extending from the connection part 34 toward the support part 36, and a hinge part 33 for supporting rotatably the plurality of beam parts 32 to the support part and the connection part. COPYRIGHT: (C)2010,JPO&amp;INPIT</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; MEASURING ; MEASURING ELECTRIC VARIABLES ; MEASURING MAGNETIC VARIABLES ; PHYSICS ; SEMICONDUCTOR DEVICES ; TESTING</subject><creationdate>2009</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20091224&amp;DB=EPODOC&amp;CC=JP&amp;NR=2009300218A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20091224&amp;DB=EPODOC&amp;CC=JP&amp;NR=2009300218A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>NAGATA KAZUSHI</creatorcontrib><title>PROBE AND PROBE CARD</title><description>PROBLEM TO BE SOLVED: To provide a probe and a probe card capable of performing stable inspection repeatedly, and a manufacturing method of the probe. SOLUTION: The probe to be provided on the probe card for performing electric inspection to an object is equipped with a connection part 34 to be connected to a wiring board of the probe card, a contact part 31 to be brought into contact with an electrode pad of the object, a support part 36 for supporting the contact part 31, a plurality of beam parts 32 extending from the connection part 34 toward the support part 36, and a hinge part 33 for supporting rotatably the plurality of beam parts 32 to the support part and the connection part. COPYRIGHT: (C)2010,JPO&amp;INPIT</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>MEASURING</subject><subject>MEASURING ELECTRIC VARIABLES</subject><subject>MEASURING MAGNETIC VARIABLES</subject><subject>PHYSICS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2009</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBAJCPJ3clVw9HNRgLCcHYNceBhY0xJzilN5oTQ3g5Kba4izh25qQX58anFBYnJqXmpJvFeAkYGBpbGBgZGhhaMxUYoAjyoeng</recordid><startdate>20091224</startdate><enddate>20091224</enddate><creator>NAGATA KAZUSHI</creator><scope>EVB</scope></search><sort><creationdate>20091224</creationdate><title>PROBE AND PROBE CARD</title><author>NAGATA KAZUSHI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2009300218A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2009</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>MEASURING</topic><topic>MEASURING ELECTRIC VARIABLES</topic><topic>MEASURING MAGNETIC VARIABLES</topic><topic>PHYSICS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>NAGATA KAZUSHI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>NAGATA KAZUSHI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>PROBE AND PROBE CARD</title><date>2009-12-24</date><risdate>2009</risdate><abstract>PROBLEM TO BE SOLVED: To provide a probe and a probe card capable of performing stable inspection repeatedly, and a manufacturing method of the probe. SOLUTION: The probe to be provided on the probe card for performing electric inspection to an object is equipped with a connection part 34 to be connected to a wiring board of the probe card, a contact part 31 to be brought into contact with an electrode pad of the object, a support part 36 for supporting the contact part 31, a plurality of beam parts 32 extending from the connection part 34 toward the support part 36, and a hinge part 33 for supporting rotatably the plurality of beam parts 32 to the support part and the connection part. COPYRIGHT: (C)2010,JPO&amp;INPIT</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_epo_espacenet_JP2009300218A
source esp@cenet
subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
title PROBE AND PROBE CARD
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-03T20%3A44%3A08IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=NAGATA%20KAZUSHI&rft.date=2009-12-24&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJP2009300218A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true