PROBE AND PROBE CARD

PROBLEM TO BE SOLVED: To provide a probe and a probe card capable of performing stable inspection repeatedly, and a manufacturing method of the probe. SOLUTION: The probe to be provided on the probe card for performing electric inspection to an object is equipped with a connection part 34 to be connected to a wiring board of the probe card, a contact part 31 to be brought into contact with an electrode pad of the object, a support part 36 for supporting the contact part 31, a plurality of beam parts 32 extending from the connection part 34 toward the support part 36, and a hinge part 33 for supporting rotatably the plurality of beam parts 32 to the support part and the connection part. COPYRIGHT: (C)2010,JPO&INPIT