COATING DEVICE

PROBLEM TO BE SOLVED: To provide a coating device which eliminates vain use of a coating fluid without a problem of dripping of the coating fluid and so on and which shortens the time to be taken for the coating treatment. SOLUTION: A nozzle 40 where a plurality of spraying holes 39 are arranged in...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	MOTODA KIMIO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY NOZZLES PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a coating device which eliminates vain use of a coating fluid without a problem of dripping of the coating fluid and so on and which shortens the time to be taken for the coating treatment. SOLUTION: A nozzle 40 where a plurality of spraying holes 39 are arranged in a row to discharge a resist solution as a coating fluid toward the surface of a substrate G held by a holding plate 31 is installed in the lower part of the main body 38 of a coating head 36. While the nozzle 40 is being scanned in the direction at right angles to the arrangement direction 50 of the spraying holes 39, the resist solution is being sprayed simultaneously through the plurality of these spraying holes 39. Also, the nozzle 40 turns by providing a turning mechanism, and a pitch P between the adjacent spraying holes 39 can be adjusted by giving a certain angle between the arrangement direction 50 and the scanning direction 51. COPYRIGHT: (C)2010,JPO&INPIT