SUBSTRATE TABLE, LITHOGRAPHIC EQUIPMENT, AND METHOD FOR MANUFACTURING DEVICE

PROBLEM TO BE SOLVED: To disclose a table having apertures for providing an oil immersion liquid on an upper surface of the table. SOLUTION: There are provided two apertures. A first aperture encloses a substrate support of the table and a second aperture is extended to the circumference of an outer...

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Bibliographische Detailangaben
Hauptverfasser:	CASTELIJNS HENRICUS JOZEF, SERGEI SHULEPOV, KATE NICOLAAS TEN, ARTS PETRUS MARTINUS GERARDUS JOHANNES
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To disclose a table having apertures for providing an oil immersion liquid on an upper surface of the table. SOLUTION: There are provided two apertures. A first aperture encloses a substrate support of the table and a second aperture is extended to the circumference of an outer edge in the table. COPYRIGHT: (C)2010,JPO&INPIT