METHOD FOR MANUFACTURING NITRIDE SEMICONDUCTOR LIGHT EMITTING ELEMENT
PROBLEM TO BE SOLVED: To provide a method for manufacturing a nitride semiconductor light emitting element which can suppress that a cleavage direction of a wafer is bent when the wafer is cleaved and can increase the yields of a bar and the element. SOLUTION: Before cleaving the wafer 1, recessed g...
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| Sprache: | eng |
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| Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a method for manufacturing a nitride semiconductor light emitting element which can suppress that a cleavage direction of a wafer is bent when the wafer is cleaved and can increase the yields of a bar and the element. SOLUTION: Before cleaving the wafer 1, recessed grooves 100 are formed on a cleavage line 101 on the surface of the wafer 1 so that a stripe core 2a is divided on a portion where at least the cleavage line 101 and the stripe core 2a are superposed to each other. COPYRIGHT: (C)2010,JPO&INPIT |
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