LIQUID REPELLENT FILM DEPOSITION METHOD, METHOD FOR MANUFACTURING NOZZLE PLATE FOR LIQUID EJECTION HEAD AND LIQUID REPELLENT FILM MANUFACTURING APPARATUS

PROBLEM TO BE SOLVED: To provide a liquid repellent film deposition method whereby a liquid repellent film excellent in durability is easily deposited. SOLUTION: A liquid repellent film manufacturing method for depositing a thin film of vapor deposition material on a substrate opposite a vapor deposition source by using as a vapor deposition material a fluorine-containing organic repellent material and using a vacuum vapor deposition method includes an evaporation step in which the vapor deposition material is evaporated, and a vapor deposition step in which the vapor deposition material evaporated in the evaporation step is vapor deposited on the substrate. In the vapor deposition step, pressure in a flying space where the vapor deposition material flies toward the substrate from the vapor deposition source is higher than pressure in a space surrounding the flying space. COPYRIGHT: (C)2010,JPO&INPIT