SUBSTRATE PROCESSOR

PROBLEM TO BE SOLVED: To provide a substrate processor which raises processing efficiency of a substrate, and simply performs conveyance control of the substrate. SOLUTION: The substrate processor is configured such that a series of substrate conveyance routes which are the ones for conveying the substrate are vertically arranged in hierarchical structure and that the substrate W is transferred between a processing part conveyance route 25 on a first floor and a processing part conveyance route 26 on a second floor, wherein the processing part conveyance routes 25, 26 are composed by vertically arranging a forward exclusive route on which the substrate is conveyed in the forward direction and a backward exclusive route on which the substrate W is conveyed in the backward direction. In addition, one end of each of the processing part conveyance routes 25, 26 is connected by an indexer 1, and the other end of each is connected by an interface 4. By constituting the processing part conveyance routes as such, waiting time of the substrate by interference between a substrate to be conveyed on the forward exclusive route and a substrate to be conveyed on the backward exclusive route is reduced, and the processing efficiency of the substrate is raised. COPYRIGHT: (C)2010,JPO&INPIT