HEIGHT MEASURING DEVICE AND METHOD

PROBLEM TO BE SOLVED: To provide a height measuring device and method that eliminates an effect of noise due to an excessive quantity of light as much as possible. SOLUTION: In a 3D sensor 2 comprising a laser oscillator 10 which perpendicularly projects laser beams onto an electronic component 17,...

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Bibliographische Detailangaben
Hauptverfasser:	OGURA KANKI, MINAMIDE HIROYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY GYROSCOPIC INSTRUMENTS MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING DISTANCES, LEVELS OR BEARINGS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS PRINTED CIRCUITS SURVEYING TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a height measuring device and method that eliminates an effect of noise due to an excessive quantity of light as much as possible. SOLUTION: In a 3D sensor 2 comprising a laser oscillator 10 which perpendicularly projects laser beams onto an electronic component 17, and a 15 degree PSD and a 35 degree PSD which receive the laser beams reflected on the surface of the electronic component 17 at positions making different angles to the perpendicular direction respectively, either one of PSD receiving no excessive quantity of light is selected out of the 15 degree PSD and the 35 degree PSD based on reflection characteristics of the electronic component 17, and the height of the electronic component 17 is measured based on an electric signal sent from the selected PSD. COPYRIGHT: (C)2010,JPO&INPIT