SAMPLE ANALYSIS METHOD USING SCANNING TRANSMISSION ELECTRON MICROSCOPE

PROBLEM TO BE SOLVED: To enable analysis of a magnetized state of a sample without using a division detector. SOLUTION: A barycenter coordinate (x1, y1) of a transmission spot A in a transmission image A11is calculated as shown in Fig.6(a). A barycenter coordinate (x2, y2) of an electron beam spot B in an electron beam spot image B11is calculated as shown in Fig.6(b). A distance L11of two coordinates and a direction V11from the barycenter coordinate (x2, y2) to the barycenter coordinate (x1, y1) are calculated on the basis of the two barycenter coordinates (x1, y1) and (x2, y2) (refer to Fig.6(c)). The direction V11is equivalent to a direction of magnetization at an observation point P11, and the distance L11is equivalent to strength of magnetization at the observation point P11. COPYRIGHT: (C)2010,JPO&INPIT