PATTERN TRANSFER DEVICE AND PATTERN TRANSFER METHOD

PROBLEM TO BE SOLVED: To avoid or reduce defective transfer of a servo pattern on a memory medium. SOLUTION: Presence or absence of a foreign matter (dust etc.) or a defect (a flaw etc.) on a surface of a memory medium before transfer of a servo pattern is inspected (step S1). Next, positions of the foreign matter or the defect on the surface of the memory medium and the servo pattern on the transfer master relative to each other are calculated (step S2). The relative position is represented for example by an angle and called as a relative angle. Next, the relative position is adjusted by rotating or moving the memory medium and/or the transfer master so as to avoid or reduce defective transfer of a transfer pattern caused by overlap of the foreign matter or the defect on the surface of the memory medium and the transfer pattern with each other (step S3). Next, the servo pattern is magnetically or physically transferred on the memory medium (step S4). By transferring the servo pattern in this way, the defective transfer of the servo pattern is avoided or reduced, the abort rate of the memory medium is reduced, and the manufacturing cost of the memory device can be reduced. COPYRIGHT: (C)2010,JPO&INPIT