SUBSTRATE CONVEYING DEVICE

PROBLEM TO BE SOLVED: To provide a low-cost substrate conveying device enabling a holding mechanism to automatically hold/release. SOLUTION: The substrate conveying device 1 comprising a substrate holding frame 11 and the holding mechanism 20 for holding the glass substrate between the substrate hol...

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Bibliographische Detailangaben
1. Verfasser: HANDA NORIHISA
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a low-cost substrate conveying device enabling a holding mechanism to automatically hold/release. SOLUTION: The substrate conveying device 1 comprising a substrate holding frame 11 and the holding mechanism 20 for holding the glass substrate between the substrate holding frame 11 and itself carries out conveying the glass substrate. The substrate conveying device 1 adopts a composition comprising a pinion 30 engaging with a rack 60 provided on a conveyance route 2 and a connection mechanism for connecting the pinion 30 and the holding mechanism 20 so as to hold/release the holding mechanism 20 according to rotation of the pinion 30. COPYRIGHT: (C)2010,JPO&INPIT