SPUTTERING DEVICE

PROBLEM TO BE SOLVED: To obtain a simple structure that has the sufficient electrostatic attraction force and quick removal property of a substrate with regard to an electrostatic chuck having a dielectric plate formed on the surfaces of a plurality of protrusions that support the substrate with top...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TANAKA HIROSHI, KANEKO KAZUAKI, ARIGA YOSHIKI, MORIMOTO EITARO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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