ORGANIC EL ELEMENT
PROBLEM TO BE SOLVED: To provide a highly reliable organic EL element with an inexpensive and simple configuration bringing about no new technical problem. SOLUTION: The organic EL element is formed including a stage of forming an anode electrode 5 on an organic flattening layer 4 formed on a matrix...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a highly reliable organic EL element with an inexpensive and simple configuration bringing about no new technical problem. SOLUTION: The organic EL element is formed including a stage of forming an anode electrode 5 on an organic flattening layer 4 formed on a matrix array substrate, and a stage of forming an SiO anode flattening layer 11 between adjacent anode electrodes 5 using a vacuum ultraviolet chemical vapor deposition growth method. An silicon oxide film forming the SiO anode flattening layer 11 includes high flattening characteristics, so a low-cost process requiring no photolithographic stage is actualized. COPYRIGHT: (C)2010,JPO&INPIT |
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