METHOD, PHASE GRATING AND DEVICE FOR ANALYZING WAVE SURFACE OF LIGHT BEAM

PROBLEM TO BE SOLVED: To provide a method, a phase grating and a device for analyzing the wave surface of a light beam. SOLUTION: The method is provided for analyzing the wave surface of the light beam F from a light source S to the focus of a lens O1. The beam F irradiates a sample LA placed on an analysis plane PDand having a defect D1. A diffraction grating GR of a plane PCis arranged in a conjugate position of the analysis plane PDthrough focal systems O2, O3, O4. An image is formed in a plane PSat a distance d from the grating plane GR and analyzed by a processing means UT. The grating GR is encoded by a phase function resulting from the combination of two phase functions which are a first excluding function of defining a meshing of useful zones transmitting the beam to be analyzed in the form of light pencil beams, and a second phase fundamental function of creating a phase opposed state between two light pencil beams coming out of adjacent meshes of the exclusion grating. COPYRIGHT: (C)2010,JPO&INPIT