FED SENSOR

PROBLEM TO BE SOLVED: To provide an FED sensor capable of large-sizing by a simple and easy structure. SOLUTION: This is the FED sensor which is equipped with a cathode substrate 10, an electron discharge source part 14 arranged on the cathode substrate, an anode substrate 12 arranged opposing to th...

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1. Verfasser: NII KEISUKE
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide an FED sensor capable of large-sizing by a simple and easy structure. SOLUTION: This is the FED sensor which is equipped with a cathode substrate 10, an electron discharge source part 14 arranged on the cathode substrate, an anode substrate 12 arranged opposing to the cathode substrate, a photoelectric conversion film 22 arranged on the anode substrate and arranged opposing to the electron discharge source part, a mesh grid 16 which is arranged between the photoelectric conversion film and the electron discharge source part and controls a current discharged toward the photoelectric conversion film from the electron discharge source part, mesh supporters 19a, 19b which retain the mesh grid at the peripheral part of the electron discharge source part and the photoelectric conversion film and has a height enough to contact the cathode substrate and the anode substrate, and an external support body 20 which is arranged at the outer peripheral part of the mesh support bodies and retains vacuum between the cathode substrate and the anode substrate. The mesh support bodies have a tapered shape toward the anode substrate from the cathode substrate. COPYRIGHT: (C)2010,JPO&INPIT