EVALUATION METHOD FOR CAPILLARY INNER SURFACE SHAPE USING LASER DIFFRACTION INTERFERENCE IMAGE AND EVALUATION SYSTEM USING THE METHOD

PROBLEM TO BE SOLVED: To provide an evaluation method for evaluating the inner surface shape of a capillary or a through pore simply non-destructively and an evaluation system using the method. SOLUTION: In applying a laser diverging ray to the interior of the capillary, concerning a diffraction interference image generated at the back of the capillary in the optical axis direction, an image of micro interference fringes appearing in a shape area (S) outside a direct light area (L) is extracted, and the intensity of light of the image of the interference fringes is measured along a measuring line. A clearance (ΔV) between a position where a first maximum value of intensity of light is measured and a position where a second maximum value is measured has a linear relationship to a clearance between an imaging surface 20a and a projecting part 30. According to this relationship, the position of the projecting part 30 is estimated using a previously created calibration data (a calibration curve). COPYRIGHT: (C)2010,JPO&INPIT