CNF PROBE CANTILEVER

PROBLEM TO BE SOLVED: To provide a CNF probe cantilever for performing stable high-resolution measurement while an unnecessary CNF is not formed in a lever section. SOLUTION: This CNF probe cantilever includes a support section, the lever section 1 extended from the support section, a projection-lik...

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Bibliographische Detailangaben
Hauptverfasser:	TANEMURA MASAYUKI, KITAZAWA MASASHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES MEASURING NANOTECHNOLOGY PERFORMING OPERATIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a CNF probe cantilever for performing stable high-resolution measurement while an unnecessary CNF is not formed in a lever section. SOLUTION: This CNF probe cantilever includes a support section, the lever section 1 extended from the support section, a projection-like probe section 2 formed at or near a free end of the lever section, and a CNF narrow line 3 formed at the tip of the probe section by supply of carbon compound and irradiation of a high energy beam. The outer rim of the free end of the lever section is formed to have a round shape having no corner. COPYRIGHT: (C)2010,JPO&INPIT