SUBSTRATE SUPPORT MEMBER

PROBLEM TO BE SOLVED: To provide a substrate support member which can maintain high temperature uniformity and thermal efficiency even under heat treatment conditions at high temperature, are not damaged, and has sufficient corrosion resistance. SOLUTION: The substrate support member 42A is installe...

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Hauptverfasser:	NAKANISHI SHUSUKE, NISHIOKA TAKAO, KURISU KENICHI, MIKUMO AKIRA, NAKADA HIROHIKO, NIIMA KENJI, NATSUHARA MASUHIRO, OKADA HIROSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a substrate support member which can maintain high temperature uniformity and thermal efficiency even under heat treatment conditions at high temperature, are not damaged, and has sufficient corrosion resistance. SOLUTION: The substrate support member 42A is installed inside a reaction vessel 41 of a semiconductor manufacturing device 40A to be used for the heat treatment of a substrate W, the inside of which is provided with a space having a heating element 44A to be conducted and heated, and the substrate support member 42A consists of a material containing nickel by 95 wt.% or more. Among surfaces of the substrate support member 42A, a corrosion resistance film 45 consisting of nickel fluoride is formed at least on the surface exposed inside the reaction vessel. COPYRIGHT: (C)2010,JPO&INPIT