MEASUREMENT DEVICE AND MEASUREMENT METHOD

PROBLEM TO BE SOLVED: To solve the problem that in a measurement method of a hollow shape by an existing technology, a hollow shape of an object is not obtained simultaneously and the object or a light source has to be rotated so that a device may be complicated, and to solve the problem of preciseness. SOLUTION: This measurement device is adapted to measure an inner shape of a hollow cylindrical object to be measured. The measurement device includes a light transmission section for transmitting light in a first direction as an axial direction of the hollow cylindrical object, a change section for changing an advancing direction of the light to a direction perpendicular to the first direction, a modulation section for applying a physical modulation to the light so as to identify the light changed by the change section in the first direction, a detection section for detecting information about focusing of the light reflected at the inside of the object to be measured in the light of which the direction is changed by the change section and information about the physical modulation, and a shape measurement section for measuring the inner shape of the object to be measured by obtaining a deviation from a predetermined reference position on the basis of the detected result of the detection section. COPYRIGHT: (C)2010,JPO&INPIT