APPARATUS AND METHOD FOR GROWING CRYSTAL

PROBLEM TO BE SOLVED: To provide an apparatus for growing a crystal capable of preventing gases present outside a chamber such as oxygen adhered on the surface of a substrate from being brought into a chamber by a simple system when a substrate is conveyed to a chamber. SOLUTION: Between a chamber 2 which becomes a space for growing a crystal on the surface of a substrate 9 and a lifter room 3 where the substrate 9 is conveyed towards the chamber 2, a conveying path forming part 4 which becomes a path for conveying the substrate 9 from the lifter room 3 to the chamber 2 is formed. In the conveying path forming part 4, a guiding tube 5 which is cylindrical, extends parallel to a conveying direction to which the substrate 9 is conveyed and through which the substrate 9 can pass is formed. An inert gas which is supplied from a gas supplying means 6 and fills up in the chamber 2 flows along in contact with the surface of the substrate 9 conveyed in passing through the guiding tube 5. COPYRIGHT: (C)2010,JPO&INPIT