LASER BEAM MACHINING APPARATUS, PITCH ADJUSTING METHOD OF LASER BEAM, AND LASER BEAM MACHINING METHOD

PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus in which ideal beam branching is possible and in which inter-beam pitch is arbitrarily adjustable, and also to provide a pitch adjusting method of a laser beam and a laser beam machining method. SOLUTION: The laser beam machining appa...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: YAMAMOTO YOSHIAKI, ONISHI YOSHINORI, TAMAGAWA KOICHI, IKEDA HITOSHI
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus in which ideal beam branching is possible and in which inter-beam pitch is arbitrarily adjustable, and also to provide a pitch adjusting method of a laser beam and a laser beam machining method. SOLUTION: The laser beam machining apparatus includes a laser beam oscillator 21, an acoustooptical element 22, a RF power source 23 connected to this acoustooptical element, and condensing lenses 24, 25. A single laser beam oscillated from the laser beam oscillator is made incident on the acoustooptical element, with a RF power impressed on the acoustooptical element, giving acoustic wave vibration to the single laser beam, and branching into a plurality of beams by Raman-Nath diffraction to adjust the beam pitch spacing. The plurality of beams with the beam spacing adjusted are passed through the condensing lenses and emitted to a workpiece surface to perform linear machining. The invention includes the pitch adjustment of a laser beam by this machining apparatus and the laser beam machining of a workpiece surface using this machining apparatus. COPYRIGHT: (C)2010,JPO&INPIT