LASER BEAM MACHINING APPARATUS, PITCH ADJUSTING METHOD OF LASER BEAM, AND LASER BEAM MACHINING METHOD
PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus in which ideal beam branching is possible and in which inter-beam pitch is arbitrarily adjustable, and also to provide a pitch adjusting method of a laser beam and a laser beam machining method. SOLUTION: The laser beam machining appa...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus in which ideal beam branching is possible and in which inter-beam pitch is arbitrarily adjustable, and also to provide a pitch adjusting method of a laser beam and a laser beam machining method. SOLUTION: The laser beam machining apparatus includes a laser beam oscillator 21, an acoustooptical element 22, a RF power source 23 connected to this acoustooptical element, and condensing lenses 24, 25. A single laser beam oscillated from the laser beam oscillator is made incident on the acoustooptical element, with a RF power impressed on the acoustooptical element, giving acoustic wave vibration to the single laser beam, and branching into a plurality of beams by Raman-Nath diffraction to adjust the beam pitch spacing. The plurality of beams with the beam spacing adjusted are passed through the condensing lenses and emitted to a workpiece surface to perform linear machining. The invention includes the pitch adjustment of a laser beam by this machining apparatus and the laser beam machining of a workpiece surface using this machining apparatus. COPYRIGHT: (C)2010,JPO&INPIT |
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