LIQUID RAW MATERIAL VAPORIZER AND FILM FORMING DEVICE USING THE SAME

PROBLEM TO BE SOLVED: To produce a raw material gas having a sufficient flow rate by increasing heating efficiency of an breathable mist trap member which vaporizes a liquid raw material in a state of droplet, and enhancing vaporization efficiency of the droplets of the liquid raw material. SOLUTION: A liquid raw material vaporizer includes a housing body 330B in a bottomed cylindrical shape having an opening end on the side of an inlet 344 for introducing the liquid raw material in a state of droplet, a cylindrical columnar block 350 loosely fit inside from the opening end to form a vaporization passage 336 with an internal surface of the housing body, and a heating portion 390 enclosing them. The breathable mist trap member 380 is provided in the vaporization passage in contact with the internal surface of the housing body, and configured to jet the liquid raw material in a state of droplet to an internal surface of the mist trap member from a discharge port 351 formed in the cylindrical columnar block. COPYRIGHT: (C)2010,JPO&INPIT