THIN FILM TRANSISTOR SUBSTRATE

PROBLEM TO BE SOLVED: To solve the problem that a resist coating film thickness depends upon a foundation pattern and when a resist film is processed by multi-tone exposure like gray-tone exposure to manage a resist remaining film thickness after development to a uniform thickness, a resist coating...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MASUTANI YUICHI, ITO YASUETSU, AOKI OSAMU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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