INSPECTION EVALUATION SYSTEM AND INSPECTION EVALUATION METHOD

PROBLEM TO BE SOLVED: To provide a technique for specifying a region, the condition of which should be treated as unconfirmed, in objects to be inspected when a plurality of objects are to be inspected. SOLUTION: An inspection evaluation apparatus 1 includes a comprehensive evaluation determination table memory part 133 for storing a comprehensive evaluation information indicating whether the inspection object region should be treated as a confirmed region or as an unconfirmed region, for each combination of the possible values of the inspection state indicating whether the state of the inspection object region is confirmed or not by these tests, for each of a plurality of predetermined tests S321, S322 and S341-S343. Also, the comprehensive evaluation information search part 123 searches, from the comprehensive evaluation determination table memory part 133, the comprehensive evaluation information corresponding to the combination of the values indicated by the inspection state of these tests for each inspection object region, and an unconfirmed region information output part 124 outputs the information of the inspection object region which is comprehensively evaluated to be treated as the unconfirmed region, based on the comprehensive evaluation information, as the information of the unconfirmed region. COPYRIGHT: (C)2010,JPO&INPIT