CLEANING LIQUID AND CLEANING METHOD

PROBLEM TO BE SOLVED: To provide cleaning liquid capable of dissolving a cerium oxide as a cerium ion and cleaning and removing it for an object to be cleaned with the cerium oxide stuck to the surface, and to provide a cleaning method using the cleaning liquid. SOLUTION: The cleaning liquid for rem...

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Bibliographische Detailangaben
Hauptverfasser:	MIYASHITA MASAYUKI, KUJIME TAKANOBU, FUTAI KEIICHI, YAMAMOTO MASASHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY CLEANING OR DEGREASING OF METALLIC MATERIAL BY CHEMICALMETHODS OTHER THAN ELECTROLYSIS COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide cleaning liquid capable of dissolving a cerium oxide as a cerium ion and cleaning and removing it for an object to be cleaned with the cerium oxide stuck to the surface, and to provide a cleaning method using the cleaning liquid. SOLUTION: The cleaning liquid for removing the cerium oxide is configured including at least one acid selected from a group comprising hydrogen fluoride, hydrochloric acid, nitric acid, sulphuric acid, acetic acid, phosphorous acid, iodin acid and hydrobromic acid, and water, and dissolves and removes the cerium oxide as the cerium ion. COPYRIGHT: (C)2010,JPO&INPIT