CHARGED PARTICLE BEAM DRAWING DEVICE AND CHARGED PARTICLE BEAM DRAWING METHOD

PROBLEM TO BE SOLVED: To provide a device or a method which can measure a temperature substantially equivalent to that of a substrate to actually be drawn. SOLUTION: The drawing device 100 includes: a drawing chamber 103; an electronic mirror cylinder 102 provided with an optical system which is placed above the drawing chamber 103 and emits an electron beam 200 into the drawing chamber 103; an isothermal layer 106 surrounding the drawing chamber 103; an XY stage 105 placed in the drawing chamber 103; a plurality of supporting pins 104 which are mounted to the XY stage 105 to directly support a substrate 101; and a plurality of temperature sensors 108 provided at the supporting pins 104. Thus, a temperature substantially equivalent to that of a substrate to actually be drawn can be measured. Even during the substrate is drawn, the temperature substantially equivalent to the substrate temperature can be measured. COPYRIGHT: (C)2010,JPO&INPIT