MICROINSPECTION DEVICE AND MICROINSPECTION METHOD

PROBLEM TO BE SOLVED: To effectively perform the microinspection of an inspection body on a floating plate in a microinspection device, and a microinspection method. SOLUTION: The microinspection device includes the floating plate 2 for floating the inspection body and actuators (2b and 10b) for mov...

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Bibliographische Detailangaben
1. Verfasser:	KATAOKA YOUSUKE
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To effectively perform the microinspection of an inspection body on a floating plate in a microinspection device, and a microinspection method. SOLUTION: The microinspection device includes the floating plate 2 for floating the inspection body and actuators (2b and 10b) for moving the floating plate 2. COPYRIGHT: (C)2010,JPO&INPIT