SETTER FOR HEAT TREATMENT OF GLASS SUBSTRATE, ITS PRODUCING METHOD AND METHOD FOR HEAT TREATMENT OF GLASS SUBSTRATE

PROBLEM TO BE SOLVED: To provide a setter for heat treatment of a glass substrate, wherewith the glass substrate such as a flat panel display substrate hardly slip. SOLUTION: The setter thermally treats the glass substrate by putting it on the upper surface, has 0-10×10-7/°C thermal expansion coeffi...

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Hauptverfasser:	MURAGUCHI YUKITO, NAGAHAMA SHINNOSUKE, TOYAMA KIMIYA, SATO KAZUHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	ARTIFICIAL STONE CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE GLASS LIME, MAGNESIA MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES METALLURGY MINERAL OR SLAG WOOL REFRACTORIES SLAG TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a setter for heat treatment of a glass substrate, wherewith the glass substrate such as a flat panel display substrate hardly slip. SOLUTION: The setter thermally treats the glass substrate by putting it on the upper surface, has 0-10×10-7/°C thermal expansion coefficient at 20-600°C, and is composed of a porous ceramic sintered body comprising communicating holes of a three-dimentional reticular structure. The setter preferably has an air permeability of 0.5-10×10-3cm2, and tis preferably composed of a lithia sintered body. COPYRIGHT: (C)2010,JPO&INPIT