METHOD AND DEVICE FOR CONTROLLING BLANKING COIL

PROBLEM TO BE SOLVED: To provide a method and a device for controlling a blanking coil which decrease the blanking-off period and thereby decrease the total period of blanking-on/off. SOLUTION: The device for controlling a blanking coil, to be used in a charge particle beam drawing device for drawin...

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Bibliographische Detailangaben
1. Verfasser:	MUTO MASAO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method and a device for controlling a blanking coil which decrease the blanking-off period and thereby decrease the total period of blanking-on/off. SOLUTION: The device for controlling a blanking coil, to be used in a charge particle beam drawing device for drawing a pattern on a drawing medium with a charged particle beam, comprises: a pair of coils L1, L2 provided for blanking; a pair of drive circuits 10, 11 applying a current to the coils; D/A converters 1, 2 provided in input sections of the drive circuits; a control CPU 4 setting digital values on the D/A converts; a differential amplification circuit for extracting the difference current in the currents applied to the pair of coils L1, L2; and an A/D converter converting the output of the differential amplification circuit into a digital value, and sends the output of the A/D converter 3 to the control CPU 4. COPYRIGHT: (C)2009,JPO&INPIT