POLYMER ORGANIC-INORGANIC OR METAL LAMINATE, AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide an organic-inorganic laminate showing uniformity at nano level. SOLUTION: An organic-inorganic laminate or an organic/metal laminate comprises a polymer organic layer of a nano level thickness and an inorganic or a metal layer which are alternatively laminated on a substrate plate, wherein the polymer organic layer is non-foaming, and a method for manufacturing an organic-inorganic laminate or an organic/metal laminate comprises forming a monomer organic layer on a substrate plate and forming an inorganic or a metal layer thereon, followed by heating the substrate plate so that the monomer organic layer is cross-linked to give a polymer organic layer, wherein K shown by the following formula 1 is less than 33; (formula 1) 10-16tc2tp2Ts4Tivä0.01/(0.01-P)}=K wherein tc(nm): thickness 80 of an inorganic or metal layer, tp(nm):thickness of a monomer organic layer, Ts(°C): a temperature of a substrate plate at starting of film forming of a polymer organic layer, Ti(°C): a curing temperature of a polymer, v (°C/min): temperature increasing speed, and P(MPa): vacuum gauge pressure upon using bagging. COPYRIGHT: (C)2009,JPO&INPIT