METHOD FOR FABRICATING INTEGRATED CIRCUIT DEVICE

PROBLEM TO BE SOLVED: To provide a method for fabricating an integrated circuit device. SOLUTION: The integrated circuit has a plurality of TFTs and an electrical interconnect structure. In the process, at least some constituents of the TFTs are formed on a first substrate 10. At least the interconn...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DODABALAPUR ANANTH, RAJU VENKATARAM REDDY, CHANDROSS EDWIN A, KATZ HOWARD EDAN
Format: Patent
Sprache:eng
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