EXPOSURE DEVICE, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING PANEL SUBSTRATE FOR DISPLAY

PROBLEM TO BE SOLVED: To easily replace a mask of different size in a short time. SOLUTION: A mask holder is divided into a plurality of independent holder portions (24a, 24b) holding a peripheral portion of the mask, and some or all of the plurality of holder portions are moved according to the size of the mask to hold the mask by the plurality of holder portions. The mask of different size is held by the plurality of holder portions and exposed without preparing mask attachments by masks of different size. The mask is held directly by the mask holder, so the need for position adjustments in two stages using mask attachments is eliminated to easily replace the mask of different size in a short time. Further, positioning precision of the mask does not decrease, so there is no decrease in baking precision of a pattern, so that a substrate of different size is exposed. COPYRIGHT: (C)2009,JPO&INPIT