ELECTRONIC DEVICE AND METHOD OF ANALYZING THE SAME
PROBLEM TO BE SOLVED: To relax the limitation of an arrangement position of a faulty point of an electronic device, when an observer pinpoints the faulty point with excellent work efficiency without consistently working together with a logical information provider, although the index body for recogn...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To relax the limitation of an arrangement position of a faulty point of an electronic device, when an observer pinpoints the faulty point with excellent work efficiency without consistently working together with a logical information provider, although the index body for recognizing various information about an analysis object and confirming a flatness on the analysis object is provided, not to increase the area, and further to easily and absolutely confirm the flatness in surface polishing of the analysis object. SOLUTION: A conductive material of an index body 10 is filled and formed in a dent formed in an interlayer dielectric film 21 without penetrating the interlayer dielectric film 21 so as to positionally conform to under the wiring part 24 existing just over it (so as to be involved in the wiring part 24 in planar view). The index body 10 is connected to the upper wiring part 24, but is not connected to the lower wiring part 24. The wiring part 24 provided in the interlayer dielectric film 22 under the index body 10 is an analysis object. COPYRIGHT: (C)2009,JPO&INPIT |
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