SPUTTERING TARGET

PROBLEM TO BE SOLVED: To provide a sputtering target capable of suppressing occurrence of a target crack. SOLUTION: The sputtering target is produced by mixing the main powder composed of In obtained by pulverizing the ingot of an intermetallic compound region with auxiliary powder of a component co...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	MATSUZAKI HITOSHI, FUJII HIDEO
Format:	Patent
Sprache:	eng
Schlagworte:	ALLOYS CASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL FERROUS OR NON-FERROUS ALLOYS INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MAKING METALLIC POWDER MANUFACTURE OF ARTICLES FROM METALLIC POWDER METALLURGY PERFORMING OPERATIONS PHYSICS POWDER METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING TREATMENT OF ALLOYS OR NON-FERROUS METALS WORKING METALLIC POWDER
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a sputtering target capable of suppressing occurrence of a target crack. SOLUTION: The sputtering target is produced by mixing the main powder composed of In obtained by pulverizing the ingot of an intermetallic compound region with auxiliary powder of a component composition different from that of the main powder, and sintering the mixture so as to obtain the prescribed component composition. The total content of Si, Al, Fe which are inevitable impurities in the content components therein is ≤300 mass ppm. Also, the intermetallic compound includes In and one or more selected Co and Ni. COPYRIGHT: (C)2009,JPO&INPIT